Design and Performance Analysis of Control System for a Micro-displacement platform

摘要：

It is difficult to balance long travel and high precision, especially in multi-coordinate machining. A stage with nanometer positioning precision is established and the control technologies are studied. Micro-EDM provides the potential feasibility for the nano-scale precision machining. The micro-EDM transmission modular is applied to to complete the discharge process of the servo in the experiment system ,which improves the processing efficiency and the processing quality. The strategy is one part of micro-EDM machine control system, which greatly enhances the positioning accuracy. Results show that the system works well. The system also has many advantages such as quick response, being smooth, ultra low speed and super resolution etc, and meets the needs of micro-EDM control. The research provides a new solution for the design of precision location stages.

关键词： Ultra-precision Ultrasonic motor Micro-EDM Motion control

作者: H.B.Lin G.Z.Yang

作者单位: Department of Mechanical and Electrical Engineering, Taizhou Vocational & Technical College, Taizhou School of Mechanical Engineering, Shenyang University of Technology, Shenyang 110870, PR China

会议类型: 国际会议

会议名称: 2011 Global Conference on Digital Design and Manufacturing Technology(2011年全国数字设计与制造技术会议)

会议地点: 杭州

会议语种:英文

页码: 254-258

在线出版日期: 2011-01-23（万方平台首次上网日期，不代表论文的发表时间）