Experimental Study on the Precision Lapping of Sapphire Substrate
Experimental research on the surface quality parameters such as roughness and removal rate in the precision lapping of sapphire was promoted in this paper, effects of processing parameters as load, speed of rotation, grain size and density on sapphire surface quality was studied by experiments. Results showed that lapping load and rotate speed were the most important factors on the removal rate, grain size played a key role in the removal rate and roughness under the same conditions, profile tolerance of surface shape depends on the flatness.
Sapphire Precise lapping Roughness Experimental study
X.Wang C.D.Lu D.H.Wen
Institute of Machinery Equipment and Measurement & Control Technology, Zhejiang Normal University, J The MOE Key Laboratory of Mechanical Manufacture and Automation, Zhejiang University of Technology,
国际会议
2011 Global Conference on Digital Design and Manufacturing Technology(2011年全国数字设计与制造技术会议)
杭州
英文
291-294
2011-01-23（万方平台首次上网日期，不代表论文的发表时间）