REVISION OF THE MICRO CONTINUANCE MEDIUM THEORY GAP AMONG ATOMS
The adhesion failure, generated by relative moving between the micro-components of the Micro electromechanical systems (MEMS), affects the performance of the MEMS greatly. Because the adhesion force on the base of the continuance medium theory does not agreed with the experiment result and the discrete result, the Hamaker hypothesis, which is the base of the continuance medium theory, is an-alyzed carefully. The atom gap, among the atoms, is found. The contradiction between Hamaker hypothesis 1 and Hamaker hypothesis 2 is found too. So the Hamaker hypothesis is not satisfied with the continuous medium hypothesis. A new dense model, called the Wigner-Seitz model, is put forward. The gap re-vision factor is obtained by comparing the two atomic forces on the base of the Wigner-Seitz model with the classical Lennard-Jones potential. By simulating the gap revision factor, a surprised discovery, which the square root of the revision factor equals the WignerSeitz volume divided by atom volume when the distance tends to infinite, is obtained. The adhesion force equation is got on the base of the discrete theory. By comparing the adhesion force simulating result on the base of the Wigner-Seitz continuous revision theory with the simulating result on the dis-crete theory, the Wigner-Seitz continuous revision theory is certified to by right. The simulating of the AFM adhesion force is obtained, which is according with experiment result.
TIAN WEN-CHAO LIU XIA-FANG JIA JIAN-YUAN
School of Elec-mechanical Engineering, Xidian University, Xian, 710071, China
国际会议
The Joint Conference of ICCP6 and CCP2003(第6届国际计算伦理会议)
北京
英文
357-364
2004-05-23（万方平台首次上网日期，不代表论文的发表时间）