Formation of Side Electrode on Quartz MEMS-based Double-ended Tuning Fork Using Enhanced Lift-off Process
This paper presents an enhanced lift-off process for forming side electrode on the quartz-based doubleended tuning fork (DETF) resonator. In the case of fabricating quartz-based DETF, electrode pattern design is an important issue. Taking advantage of the piezoelectricity effect, a simple surface electrode can excite the flexural motion of the DETF, however it suffers from the large motional resistance. Proposed lift-off process can pattern excitation electrode on the side wall without using special photolithograph equipments. Experimental results demonstrated that the motional resistance can be reduced by several times by forming side electrode using proposed process.
Quartz MEMS Double-ended tuning fork Side electrode Lift-off
Jinxing Liang Xuefeng Li Yunfang Ni Hongsheng Li Libin Huang Kunyu Li
Key Laboratory of Micro-lnertial Instrument and Advanced Navigation Technology, Ministry of Educatio Graduate School of Information, Production and Systems, Waseda University, Kitakyushu 808-0135, Japa
国际会议
2011 International Conference on Mechatronics and Materials Processing(2011年机电一体化与材料加工国际会议 ICMMP)
广州
英文
507-510
2011-11-18（万方平台首次上网日期，不代表论文的发表时间）