Cooperative Optimal Method for Two Level Models of Micro Device

摘要：

With the gradual complication of micro devices, the poor manufacturability of product becomes a bottleneck. In this paper, we discuss the optimal design method that involves the model restriction, model revising and cooperative design management. Firstly, the design rules checking for the original model is introduced, which constrains the 3D models into an appropriate form to satisfy the manufacturing requirements. Then, the informational description of micro device involves two levels. The device level modeling focuses on geometric information, while the process level modeling works at manufacturability. Based on the two level models, the model revising procedure is performed in cooperative design environment. Furthermore, a polysilicon electrothermal actuator is used to illustrate the cooperative optimal design approach.

关键词： Cooperative design Micro device Optimal design Surface micromachining

作者: Zheng LIU Hua CHEN

作者单位: School of Mechatronic Engineering, Xian Technological University, Xian China Xian Technological University, Xian China

会议类型: 国际会议

会议名称: 2011 International Conference on Mechatronics and Materials Processing(2011年机电一体化与材料加工国际会议 ICMMP)

会议地点: 广州

会议语种:英文

页码: 783-787

在线出版日期: 2011-11-18（万方平台首次上网日期，不代表论文的发表时间）