Tribological Applications Considering Roughness Effects on Grain Flow

摘要：

The grain flow lubrication, based on Haffs grain flow theory and the Patir/Cheng flow factors method, is applied in the simulations of rough slider bearings and chemical mechanical polishing. In this paper, the results of flow factor, the performance of rough slider bearings and the mechanism of the CMP process for grain flow are briefly demonstrated. An improved CMP model, considering the partial hydrodynamic grain flow lubrication and elastic-plastic microcontact theory, is also proposed. The contact area ratio and the elastoplastic contact area ratio are presented to improve the understanding of CMP mechanisms.

关键词： Roughness Grain Flow Lubrication Flow Factor

作者: Hung-Jung Tsai Jeng-Haur Horng Hung-Cheng Tsai Pay-Yau Huang

作者单位: WuFeng University, Chia-Yi 621, Taiwan National Formosa University, Huwei, Yunlin 632, Taiwan National Kaohsiung First University of Science and Technology, Kaohsiung 811, Taiwan

会议类型: 国际会议

会议名称: 2011 International Conference on Mechatronics and Materials Processing(2011年机电一体化与材料加工国际会议 ICMMP)

会议地点: 广州

会议语种:英文

页码: 837-842

在线出版日期: 2011-11-18（万方平台首次上网日期，不代表论文的发表时间）