Stress-Induced Phase Transformations of Micro-Crystalline Silicon Films Arising at Nanoindentations

摘要：

The stresses and strain values at various indentation depths are applied to determine the Gibbs free energy at various phases. The intersections of the Gibbs free energy lines are used to determine the possible paths of phase transitions arising at various indentation depths. All the critical contact stresses corresponding to the various phase transitions predicted by the proposed model for the specimens treated at four annealing temperatures were found to be consistent with the experimental results. The proposed model is thus valid for predicting contact parameters using nanoindentations. The critical contact stresses for the phase transitions increased with increasing specimen annealing temperature.

关键词： indentation Gibbs free energy phase transition

作者: Chang-Fu Han Jen-Fin Lin

作者单位: Department of Mechanical Engineering,National Cheng Kung University,No. 1, University Road, Tainan 701, Taiwan

会议类型: 国际会议

会议名称: 2011 International Conference on Mechatronics and Materials Processing(2011年机电一体化与材料加工国际会议 ICMMP)

会议地点: 广州

会议语种:英文

页码: 910-914

在线出版日期: 2011-11-18（万方平台首次上网日期，不代表论文的发表时间）