A Special Manufacture of Nanowires with High Precision and Its Concrete Implement

摘要：

This paper describes a way to realize the manufacture of nanowires in detail, which would be discussed mainly on the implement methods as well as the specific craft. Accounting for the cost, this way relied relative fewer on the high-precision photoetching machine, while it took use of the excellent surface of Si and SiO2, applying oxidation to diminish the width of these wires1. The paper would cover some regulations of conditions and concrete steps to present a whole technical process.

关键词： Manufacture of nanowires oxidation methods technical process low cost

作者: Wang Zhe Qin Xian JiaoRong Fan

作者单位: Institute of micro-electronics, Tsinghua University, Beijing

会议类型: 国际会议

会议名称: 2011 International Conference on Mechatronics and Materials Processing(2011年机电一体化与材料加工国际会议 ICMMP)

会议地点: 广州

会议语种:英文

页码: 1118-1121

在线出版日期: 2011-11-18（万方平台首次上网日期，不代表论文的发表时间）