The Formation of Super-Thin Dielectric Film on Porous Substrate and its Stopping -Transmittance Characteristics for Particles

摘要：

The formation of super-thin continuous dielectric film (e.g. the ion barrier film-IBF) on microchannel plate (a kind of porous substrate) is most important for prolonging the operating life of the third generation micro-light image tube. In this paper, firstly, the formation of AI2O3 ion barrier film on microchannel plate (MCP) using a new contaminationfree technology was introduced. According to the analysis and the comparison with the traditional direct formation technology, it was found that the productivity of the new technology is better (90％) and the carbon contamination can be minimized. Next, the stopping and transmittance characteristic of the film for electrons were studied and the measurement principle was shown, In this measurement, the concepts of dead-voltage and electron transmittance were proposed to evaluate the stopping and transmittance of the film for electrons. The dead-voltage was 220V for the MCP covered the ion barrier film with a thickness of 5nm and the electron transmittance was over 90％.

关键词： MicroChannel plate Ion barrier film Contamination-free Stopping and transmittance

作者: Li Chen Ye Li Xulei Qin Kui Wu Delong Jiang Jingquan Tian

作者单位: Changchun University of Science and Technology, Changchun 130022, China Changchun University, Changc Changchun University of Science and Technology, Changchun 130022, China

会议类型: 国际会议

会议名称: 2011 International Conference on Mechatronics and Materials Processing(2011年机电一体化与材料加工国际会议 ICMMP)

会议地点: 广州

会议语种:英文

页码: 1305-1308

在线出版日期: 2011-11-18（万方平台首次上网日期，不代表论文的发表时间）