A Zero TCF SAW Contact Stress Sensor in ZnO/SiO2/Si Structure

摘要：

A thin sensor based on surface acoustic wave resonator (SAWR) in ZnO/SiCVSi structure for wireless contact stress measurement in thin gap is numerically analyzed. Firstly, the scheme of the SAWR stress sensor and surface effective permittivity for analyzing surface acoustic wave (SAW) in ZnO/SiCVSi structure are introduced. Then, the phase velocity and electromechanical coupling coefficient of ZnO (lum)/SiO2(1.4um)/Si structure for the fundamental and first Rayleigh mode are obtained. For both Rayleigh modes, the temperature coefficient of frequency (TCF) for the structure at different frequency is calculated. Good temperature stability for the structure is achieved at frequency lGHz for the first Rayleigh mode with averaged TCF about 0.04ppm/℃ and stress sensitivity about 22ppm/MPa.

关键词： SAW contact stress zero TCF ZnO/SiO2/Si stiffness matrix method

作者: Jiexiong DING Dong CHEN Li Du Guangmin LIU

作者单位: School of Mechatronics Engineering, University of Electronic Science and Technology of China,Chengdu institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics,Mianyang, Chi

会议类型: 国际会议

会议名称: 2011 International Conference on Vibration,Structural Engineering and Measurement(2011年振动、结构工程与测量国际会议 ICVSEM 2011)

会议地点: 上海

会议语种:英文

页码: 1894-1898

在线出版日期: 2011-10-21（万方平台首次上网日期，不代表论文的发表时间）