A Study of Temperature Dependence for Capacitive Pressure Sensor

摘要：

In order to reveal the temperature dependence of a touch mode capacitive pressure sensor, temperature dependence of material parameters of the sense have been studied. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that the relation of capacitance and temperature is almost linear in touch state of the sensor. At the same time, temperature sensitivities under different pressure are slight difference, which are 0.0056pF/K and 0.0040pF/K, respectively. Therefore, the hightemperature performance of the sensor is greatly outstanding.

关键词： Capacitive pressure sensor Temperature dependence Thermo-mechanical analysis

作者: Hao Jie Lv Guo Qing Hu Xing Ye Wang

作者单位: School of Physics and Electronics, Henan University, Kaifeng, 475001, China Dept. of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005, China School of Information Engineering, Zhengzhou University, Zhengzhou, 450001, China

会议类型: 国际会议

会议名称: 2011 International Conference on Vibration,Structural Engineering and Measurement(2011年振动、结构工程与测量国际会议 ICVSEM 2011)

会议地点: 上海

会议语种:英文

页码: 2024-2027

在线出版日期: 2011-10-21（万方平台首次上网日期，不代表论文的发表时间）