Design and Fabrication of a Micro-capacitor for Nano Probing System
Quantitative dimensional metrologies of Nano/microstructures are increasingly demanded following the rapid developments in, for instance, semiconductor and precision engineering industry, microsystem technology and materials science. In the recent years, coordinate measuring machines (CMMs) have become versatile and widespread metrology tools. Probing system is an important component of a CMM. A probing system based on a high accurate positioning transducer is crucial for micro and nano metrology. This paper presents a probing system based on a variable micro-capacitive transducer which has advantages of simple structure, low cost, high sensitivity, overload ability, excellent dynamic response characteristics, etc. The structure of variable capacitor was designed and optimized by means of finite element method (FEM), and fabricated by surface micromachining technology.
CMM Probing system Variable capacitive transducer FEM MEMS
Ming Xuan He Xin Lu Xin Chen Xing Ling Yuan Li Hong Wang Gui Fu Ding
National Key Laboratory of Science and Technology on Nano/Micro Fabrication Technology,Shanghai Jiao Shanghai Institute of Measurement and Testing Technology, 1500 Zhangheng Road, 201203,Shanghai, Chin Department of Instrument Science and Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road,
国际会议
上海
英文
2255-2258
2011-10-21（万方平台首次上网日期，不代表论文的发表时间）