A Parallel-Plate Actuated Test Structure for Fatigue Analysis of MEMS

摘要：

Silicon, heavily used as a structural material in MEMS, is subject to several reliability concerns most importantly fatigue that can limit the utility of MEMS devices in commercial and defense applications. A novel parallel-plate actuated test structure for fatigue analysis of MEMS is designed in this paper, and the structure is fabricated by bulk micromachining. Firstly, according to the predefined dimensions, we gain the natural frequencies of the structure by modal analysis. Secondly, the pull-in voltages of bend mode and torsional mode are obtained respectively by the theoretical analysis and the electromechanical coupling finite element analysis, and the results substantiate that the two methods are approximate. Finally, a brief design of the structure’s micromachining is offered, and the structure has been fabricated ,waiting for tests. All of the analysises indicate that the structure can meet the requirements of fatigue test.

关键词： MEMS fatigue test bulk micromachining pull-in voltage electromechanical coupling

作者: Qi MIN Junyong TAO Yun’an ZHANG Xun CHEN

作者单位: Key Laboratory of Science and Technology on Integrated Logistics Support National University of Defense Technology Changsha, China

会议类型: 国际会议

会议名称: 2011 International Conference on Quality,Reliability,Risk,Maintenance,and Safety Engineering(2011年质量、可靠性、风险、维修性与安全性国际会议暨第二届维修工程国际学术会议 ICQR2MSE 2011)

会议地点: 西安

会议语种:英文

页码: 309-313

在线出版日期: 2011-06-17（万方平台首次上网日期，不代表论文的发表时间）