Static analysis of a large-displacement low-voltage micro actuator

摘要：

The large-displacement, low-voltage and fast response are the research direction of the micro actuator. The micro actuator of the electrostatic transverse loading exist problems of the oversized voltage or undersized displacement. The model of a largedisplacement low-voltage micro actuator is presented based on the principle of the vertically-horizontally bending. The elastic force is transformed from the restoring force to the driving force. The deflection equation of the micro beam is derived. The simulation shows that the displacement is as big as 145μm; the driving voltage is as low as 5V. The displacement and driving voltage are superior to the current micro actuator performance.

关键词： MEMS micro actuator vertically-horizontally bending deflection equation

作者: Tian Wenchao Wang Hongming

作者单位: School of Electro-Mechanical Engineering, Xidian University Taibai Southern Road No.2, Xian, 710071, China

会议类型: 国际会议

会议名称: 2011 International Symposium on Advanced Packaging Materials(2011年先进电子封装材料国际会议APM)

会议地点: 厦门

会议语种:英文

页码: 163-167

在线出版日期: 2011-10-25（万方平台首次上网日期，不代表论文的发表时间）