The Applications of Micro-Nanofabrication Technologies in T/R Modules
Transmit receive modules as the key part of active phased array antennas are focused on how to reduce the volume, weight, and improve the performance in high frequency. Micro- nanofabrication technologies can play a strategic role in improving the performance, functionality, and reducing the mass of transmit receive modules for active phased array antennas. This paper reports recent results on the micro- nanofabrication technologies such as thin film microwave circuits and nano optical elements. The thin film microwave circuits which are applied in transmit receive modules that have 50 μm line width and high density ground vias have been fabricated. The nano optical elements which are applied in optical detector that have finest width of 100 nm and aspect ratio of 7 and 13 have also been fabricated.
Micro- nanofabrication technologies T/R modules thin film microwave circuits nano optical elements
Liu Longhua Hu Jun
East China Research Institute of Electronics Engineering, Hefei 230088, Anhui, P.R. China
国际会议
2011 IEEE CIE International Conference on Radar(2011年IEEE国际雷达会议RADAR 2011)
成都
英文
1231-1234
2011-10-24（万方平台首次上网日期，不代表论文的发表时间）