SPICE MODEL ON HIGH FREQUENCY VIBRATION FOR CMUT APPLICATION

摘要：

A compact CMUT structure with movable floating gate is presented. The new active CMUT structure comprises two traditional CMUT electrodes and MOS transistor well beneath it. Its spice model on DC analysis and transient analysis with time-varying capacitor are investigated. It exhibits low overall parasitic capacitance and low output impedance compared with traditional one. According to Cadence simulation results, the output signal amplitude is 54 μV, while the noise floor is 33.21 nV/Hz1 2at 1MHz operation frequency of CMUT receiver, and the output impedance is only about 153Ω. These results show advantages to make an interesting potential application on CMUT array imaging.

关键词： CMUT Spice model

作者: BENXIAN PENG TING YU AND FENGQIYU

作者单位: Department of Integrated Electronics Shenzhen Institutes of Advanced Technology Chinese Academy of Sciences, Shenzhen, China The Chinese University of Hong Kong, Hong Kong, China

会议类型: 国际会议

会议名称: 3rd International Conference on Mechanical and Electrical Technology(ICMET2011) (2011第三届机械与电气技术国际会议)

会议地点: 大连

会议语种:英文

页码: 107-111

在线出版日期: 2011-08-26（万方平台首次上网日期，不代表论文的发表时间）