SEMI-ANALYTICAL MODEL OF THE PULL-IN BEHAVIOR OF AN ELECTROSTATICALLY ACTUATED CANTILEVER MICROBEAM

摘要：

For the deformation problem of electrostatically actuated microbeams used in MEMS, based on the parallel-plate prototype, pull-in behaviors of a cantilever microbeam have been analyzed by selecting the modal shape functions of cantilever beams as admissible trial function and using Rayleigh-Ritz energy method.Approximate analytical expressions for pull-in voltage and normalized pull-in displacement of a cantilever microbeam at the free end have been obtained.When the pull-in occurs, the pull-in voltage and normalized pull-in displacement of the cantilever beam at the free end are 73.95V and 0.448, respectively.Compared to the results reported in other literatures, it is shown that the obtained analytical solution possesses high accuracy.

关键词： MEMS Pull-in Cantilever beam Electrostatic force

作者: KONG SHENGLI SHANDONGRI ZHANG LILI

作者单位: School of Mechanical Engineering,Shandong Polytechnic Universtiy Key Laboratory of Advanced Manufacture and Control Technology for Light Industrial Equipments of Shandong Province

会议类型: 国际会议

会议名称: 3rd International Conference on Mechanical and Electrical Technology(ICMET2011) (2011第三届机械与电气技术国际会议)

会议地点: 大连

会议语种:英文

页码: 13-17

在线出版日期: 2011-08-26（万方平台首次上网日期，不代表论文的发表时间）