INVESTIGATION OF ELECTROHYDRODYNAMIC PATTERNING OF MICRO STRUCTURES AT ROOM TEMPARTURE

摘要：

EHD (Electrohydrodynamic) patterning forming micro structures with UV light curable materials at room temperature is investigated in this paper.It is a process for fabricating patterns on polymer film by applying electrical field to the template and the substrate as an electrode pair.The maintaining time of EHD patterning is reduced from several hours to tens of minutes by using UV curable polymer with low viscosity.The flat template generates the periodic pillars with micro scale.The periodic pillars with different period are obtained by varying the applied voltage in the different phase of experiment.The micro scale replication with good fidelity is produced by using patterned template made of doped silicon wafer.

关键词： Electrohydrodynamic Patterning UV curable Room temperature

作者: XIN LI YUCHENG DING JINYOU SHAO HONGZHONG LIU

作者单位: State Key Laboratory for Manufacturing Systems Engineering,Xian Jiaotong University,Xian,Shaanxi 710049,Peoples Republic of China

会议类型: 国际会议

会议名称: 3rd International Conference on Mechanical and Electrical Technology(ICMET2011) (2011第三届机械与电气技术国际会议)

会议地点: 大连

会议语种:英文

页码: 383-387

在线出版日期: 2011-08-26（万方平台首次上网日期，不代表论文的发表时间）