A drive-control system for 3D piezoelectric stick-slip positioner

摘要：

The micro-positioning system composed of dynamic piezoelectric translation devices features nanoscale resolution, millimeters range, compact structure and availability in extreme operating conditions, and it is commonly used in field of micro-nano operation. To solve the problem of the drive and control of the piezoelectric stick-slip positioner, a 3-channel drive-control system is developed. The driver is designed with a high-power integrated operational amplifier based on a mixed approach of voltage control and current control. The two modes can be switched easily in the use. A high speed DSP chip is chosen as the core of the controller which receives and processes the commands from PC. Experimental results show that the drivecontrol system has a resolution less than 4.6mV, a linearity error of 0.014％ and a full power response bandwidth up to 5 kHz.

关键词： micro-positioning system stick-slip PZT driver

作者: Weibin Rong Shizhong Zhang Xingxing Liu Miao Yu

作者单位: State Key Laboratory of Robotics and System Harbin Institute of Technology Harbin,Heilongjiang Province,China

会议类型: 国际会议

会议名称: The 6th International Forum on Strategic Technology(IFOST 2011)(第六届国际战略技术论坛)

会议地点: 哈尔滨

会议语种:英文

页码: 317-322

在线出版日期: 2011-08-22（万方平台首次上网日期，不代表论文的发表时间）