The Fabrication of Array Wind Speed and Direction Sensor Based on Pt Film

摘要：

In order to meet the measurement requirements of the two-dimensional flow field in small-scale space, a new hot film wind speed and direction sensor based on Pt film is designed in this paper. The figure of array sensor is formed by magnetron sputtering and mechanical mask, whose process is simple and has good consistensy; the insulation groove is formed by micromachining technology, which can reduce the interaction between the heating elements and thermosensitive elements, so the power consumption is reduced, and the sensitivity is improved, the measurement of low wind speed is achieved.

关键词： wind speed and direction sensor Ptfilm magnetron sputtering micromachining array sensor

作者: Feng Qiaohua Shi Yunbo Sun Lining

作者单位: The higher educational key laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province,College of Measurement-Control Tech. & Communications Engineering,Harbin University of Science and Technology Harbin,China

会议类型: 国际会议

会议名称: The 6th International Forum on Strategic Technology(IFOST 2011)(第六届国际战略技术论坛)

会议地点: 哈尔滨

会议语种:英文

页码: 832-835

在线出版日期: 2011-08-22（万方平台首次上网日期，不代表论文的发表时间）