3-DOF MEMS Gyroscope Modeling and Design

摘要：

In this paper, issues related to the modeling and designs on a 3-DOF (degree-of-freedom) MEMS Gyroscope are studied. The MEMS Gyroscope employs a combination of two proof-masses and flexures to form 1-DOF resonator in the drive direction and 2-DOF oscillator in the sense direction. The 3-DOF MEMS Gyroscope has very stable responses within flat region for both gain and phase corresponding to variations in spring coefficient or quality factor. Through simulation and analyses, the gyroscope is optimized. The high operational frequency device (5.053 kHz) and bandwidth over 1 kHz is designed. In the full scale range ±500°/s. the high scale factor about 0.527 mv/(°/s) is achieved.

关键词： MEMS gyroscope Modeling and design stable responses

作者: Xuguo Huang Ping Sun Zhi Wang

作者单位: Chengdu Goldtel Electronic Technology Co,LTD Chengdu, China Imperial College London London, UK Sichuan Agriculture University Yaan, China Chengdu Goldtel Electronic Technology Co,LTD Chengdu, China

会议类型: 国际会议

会议名称: 2011 International Conference on Electronic & Mechanical Engineering and Information Technology(EMEIT 2011)(2011年机电工程与信息技术国际会议)

会议地点: 哈尔滨

会议语种:英文

页码: 849-852

在线出版日期: 2011-08-12（万方平台首次上网日期，不代表论文的发表时间）