The research of temperature compensation technology of high-temperature pressure sensor
Silicon piezoresistive pressure sensor is a kind of sensor with excellent performance, wide range of applications. But its sensitive components make itself vulnerable to temperature, only by solving the problem of temperature compensation can improve the accuracy ? stability and other important performance. The high temperature and high pressure silicon pressure sensor actual operating temperature range is (- 55 ℃-+ 175 ℃); its hardware compensated temperature range is (+ 25 ℃ ~+ 80 ℃) which is narrower than its actual operating temperature range, zero drift maximum reach 0.65％ FS/10℃.These can not reach the using requirement. This article has analyzed the experimental data of this pressure sensor in the full operating temperature range. According to the characteristics of different temperature interval, the method of software compensation has been used to reduce zero temperature drift rate by an order of magnitude. Experiments prove that the piecewise polynomial fitting method which this article uses has good effect, and good applicability in compensating zeropoint temperature drift and the original sensor unbalance, worth extending.
high-temperature pressure sensor wheatstone bridge temperature compensation high accuracy zero mal-adjustment temperature drift
Cui Chun sheng Ma Tie hua
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China) Ministry Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China) , Minist
国际会议
哈尔滨
英文
2267-2270
2011-08-12（万方平台首次上网日期，不代表论文的发表时间）