Analytic Study on Micro Electromechanical Systems Sensor

摘要：

The pressure sensor is an important branch of micro electromechanical systems (MEMS). In this paper, the pressure sensor is explored and studied both on theory and experiment The basic principle, the accuracy, the repeatability and the arrearage of the sensor are analyzed in details, which improve scientific basis for the sensor selection. At last, the chip structure of the sensor is explored clearly. Through the research, we find that the sensor designed in this paper has the chief advantages, such as the work reliability and high linearity.

关键词： Micro electromechanical systems Sensor Analytic Study

作者: Ping Zhang Gunxian Yang Zhiyong Zhang

作者单位: Department of Mechanical Engineering Zhengjiang High Vocational Technology School Zhenjiang, Jinagsu Department of Power Systems and Automation Luoshan Electric Power Company Xinyang, Henan Province, P

会议类型: 国际会议

会议名称: 2011 International Conference on Electronic & Mechanical Engineering and Information Technology(EMEIT 2011)(2011年机电工程与信息技术国际会议)

会议地点: 哈尔滨

会议语种:英文

页码: 4593-4596

在线出版日期: 2011-08-12（万方平台首次上网日期，不代表论文的发表时间）