Nano-Displacement Measurement with Grating Interference

摘要：

Nano-Grating measurement technology has been made great development in our country, for its unique advantage which isnt available in laser interferometer. This paper presents a Nano-grating interferometer displacement measuring system based on double diffraction grating and Semiconductor laser light source, analyzes the error origin of the system in detail and uses error correction and compensation method to improve the measurement accuracy. The experimental result indicated that the system does have stable interferometer, high signal contrast, and easy adjusted optical path, further more the system with a strong environmental adaptability and compact structure. Under 20mm range and 50mm/sec measurement speed, the systems measuring repeatability is below 30nm.

关键词： Nanometer Displacement measurement Grating interferometer error

作者: JIANG Minlan LI Fupeng WANG Xiaodong

作者单位: Zhejiang Normal University, Jinhua 321004,China

会议类型: 国际会议

会议名称: The 3th International Conference on Precision Instrumentation and Measurement 2011(CPIM2011)(第三届精密仪器与测量国际学术会议)

会议地点: 湘潭

会议语种:英文

页码: 35-40

在线出版日期: 2011-07-19（万方平台首次上网日期，不代表论文的发表时间）