Study of the Light Source Affects the Second Order Moire Fringe Quality of Nano-Grating
Two groups of indicator grating and scale grating produce two groups of first order Moire fringe. Two groups of first order Moire fringe interfere and produce second order Moire fringe, and then by signal measurement and subdivide to the second order Moire fringe, we can achieve nanometer accuracy. In which, the quality of the second order Moire fringe has important influence on the quality of the nanograting quality. In the second order Moire fringe formation process, the characteristic of light source, the manufacture and assembling accuracy of scale grating and indicator grating and optical system, interference and noise etc. have an important influence on the quality of the second order Moire fringe. This paper study the change of light source properties which formed the second order Moire fringe to the quality of the second order Moire fringe based on Lighttools software simulation. In order to provide a theoretical evidence for optimize design of the light source.
nano measurement grating sensors second order Moire fringe light source Lighttools software
Ma Xiushui Sun Xiaoji Zhong Weihong Guan Hongwei
Ningbo Institute of Technology, Zhejiang University, Ningbo, China 315100
国际会议
湘潭
英文
57-62
2011-07-19（万方平台首次上网日期，不代表论文的发表时间）