Displacement Sensor with Controlled Measuring Force and its Characteristics Analysis

摘要：

A displacement sensor with controlled measuring force and its characteristics analysis are discussed in this paper. The displacement sensor consists of an electric induction transducer with high resolution and a voice coil motor (VCM). The measuring principles, structure of the sensor are discussed. Theory model, dynamic and static characteristics of VCM are analysed. A measuring system for surface topography with large measuring range is constructed based on the displacement sensor and 2D moving platform. Measuring force of the sensor in measurement process of surface topography can be controlled at uN level and hardly changes. It has been used in measurement of bearing hall, bullet mark, etc.

关键词： Surface topography Displacement sensor Inductance Characteristics analysis

作者: Yang Liangen Wang Xuanze Zheng Lin

作者单位: Mechanical Engineering School of Hubei Technology University, Wuhan,Hubei,China,430068 Key Laborator Mechanical Engineering School of Hubei Technology University, Wuhan,Hubei,China,430068

会议类型: 国际会议

会议名称: The 3th International Conference on Precision Instrumentation and Measurement 2011(CPIM2011)(第三届精密仪器与测量国际学术会议)

会议地点: 湘潭

会议语种:英文

页码: 309-313

在线出版日期: 2011-07-19（万方平台首次上网日期，不代表论文的发表时间）