Analysis of Response Characteristic of a Novel MEMS Inertial Sensor By Matlab

摘要：

In this paper the closed-loop model of a novel MEMS inertial sensor with the actuators drived by Lorentz force for increasing the initial sensing capacitance is established and the simulations are finished by using Matlab/Simulink. By comparing the different results between the open-loop and closed-loop, the performance of the sensor is analyzed. The results show that in closed-loop state, when the resonant frequency is 1173 Hz, the linearity range of the sensor is within -10g ～ 10g, which is almost twice over the situation in open-loop state. The bandwidth frequency is also up to 2865 Hz and the stability has been improved dramatically.

关键词： Capacitive sensor Inertial sensor Closed-loop Deep RIE

作者: DONG Linxi LI Shouluo Liu Baoqing WANG Wei YAN Haixia

作者单位: the Key Laboratory ofRF Circuits and System of Ministry of Education, Hangzhou Dianzi University, Ha the Key Laboratory ofRF Circuits and System of Ministry of Education, Hangzhou Dianzi University, Ha Toshiba Hydro-Electro Equipments Company, Hangzhou 311504, China

会议类型: 国际会议

会议名称: 2011 China-Japan Joint Microwave Conference(2011年中日微波会议CJMW 2011)

会议地点: 杭州

会议语种:英文

页码: 629-632

在线出版日期: 2011-04-20（万方平台首次上网日期，不代表论文的发表时间）