Modeling and Investigation on the Performance of a Novel MEMS Inertial Sensor with the Actuators Drived by Lorentz Force

摘要：

A novel MEMS inertial sensor with the actuators drived by Lorentz force for increasing the initial sensing capacitance is proposed. The model of the sensor system is established and the simulations are finished by using Matlab/Simulink. The mechanical noise, the displacement response, the fringe effect and the air damping under various initial capacitance distance are analyzed, respectively. The results show that the working rang of the novel MEMS accelerometer is 4μm～9μm, the static capacitance can reach to 25.17 pf for 4um initial comb capacitance distance, the displacement sensitivity is 0.7 μm/g, and the displacement response time is less than 0.05s. The mechanical noise is reduced from 13.2 μg√HZ to 1.2 μg√HZ by etching damping slots in the sensing combs of the actuators.

关键词： Capacitive sensor Inertial sensor Mechanical noise Deep RIE

作者: DONG Linxi WANG Wei LI Shouluo Liu Baoqing YAN Haixia

作者单位: the Key Laboratory of RF Circuits and System of Ministry of Education, Hangzhou Dianzi University, H the Key Laboratory of RF Circuits and System of Ministry of Education, Hangzhou Dianzi University, H Toshiba Hydro-Electro Equipments Company, Hangzhou 311504, China

会议类型: 国际会议

会议名称: 2011 China-Japan Joint Microwave Conference(2011年中日微波会议CJMW 2011)

会议地点: 杭州

会议语种:英文

页码: 633-636

在线出版日期: 2011-04-20（万方平台首次上网日期，不代表论文的发表时间）