CH4 and CO2 Detection by Using Carbon Nanotube-based Sensors

摘要：

This research was carried out to investigate the effect of gas adsorption towards the electrical resistance of carbon nanotubes (CNTs) thin film. CNTs were synthesized by Floating Catalyst Chemical Vapor Deposition (FC-CVD) method on quartz substrate at 950° C under methane gas flow rate of 150 Standard Cubic Centimeters per Minute (SCCM). Then, the electrical resistance of CNTs was measured by exposing the sensors to CO2 and CH4 gases operating at room temperature. The sensors showed high responses to the gaseous molecules. In the same experimental conditions, the recovery of the sensors was different for CO2 and CH4. It was also observed that the CNTs device behaves as a p-type semiconductor when exposed to gaseous molecules. The fabrication process was relatively simple and did not require special techniques.

关键词： Carbon nanotubes Chemical vapor deposition Electrical resistance Gas exposure Quartz substrate

作者: Amin Firouzi Shafreeza Sobri Faizah Mohd Yasin Fakhrul-razi b.Ahmadun

作者单位: Department of Chemical and Environmental Engineering,Faculty of Engineering,University Putra Malaysia 43400,Malaysia

会议类型: 国际会议

会议名称: the 2011 International Conference on Key Engineering Materials(ICKEM 2011)(2011关键工程材料国际会议)

会议地点: 三亚

会议语种:英文

页码: 482-489

在线出版日期: 2011-03-25（万方平台首次上网日期，不代表论文的发表时间）