Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine

摘要：

Boron nitride coatings have been prepared by chemical vapor deposition using borazine as single precursor at 900 ℃. The effect of the total pressure on the surface morphologies of the coatings was investigated. For low total pressures (≤ 3 kPa), the deposits presents a compact pebble-like surface structure. However, when high total pressures (> 3 kPa) were used, the surface of the coatings presents a loose grain-like feature. When the total pressure increases up to 12 kPa, the coatings shows a porous surface structure. The composition and structure of the deposited coatings were investigated by means of FTIR and XRD analysis. It shows that the coatings have a structure of turbostratic boron nitride.

关键词： borazine chemical vapor deposition boron nitride coatings

作者: Jun-Sheng Li Chang-Rui Zhang Bin Li Feng Cao Si-Qing Wang

作者单位: State Key Laboratory of Advanced Ceramic Fibers & Composites,College of Aerospace & Materials Engineering,National University of Defense Technology,Changsha410073,PR China

会议类型: 国际会议

会议名称: the 2011 International Conference on Key Engineering Materials(ICKEM 2011)(2011关键工程材料国际会议)

会议地点: 三亚

会议语种:英文

页码: 588-592

在线出版日期: 2011-03-25（万方平台首次上网日期，不代表论文的发表时间）