Development of Solid-Based Modeling System for Surface Micromachined MEMS

摘要：

Although a lot of CAD systems and tools have developed for MEMS, there does not appear to be a means for solid-based modeling. In this paper, a modeling system based on three-dimensional solid model for surface micromachined devices is developed. The system consists of three main modules: fast process simulation and material-based process simulation; automatic mask synthesis based on solid model; collaborative modeling to support design refinement. Based on a solid modeling core ACIS, the system is implemented in VC++ and some test results are given. The system helps MEMS designers work in a more intuitive mode.

关键词： CAD MEMS, Collaborative modeling Surface micromachining

作者: Jianhua LI Yusheng LIU Hao LING Weibin GUO Gaoqi HE

作者单位: Dept of Computer Sci. and Eng., East China University of Science and Technology, Shanghai, 200237, C State Key Lab of CAD&CG, Zhejiang University, Hangzhou Zhejiang, China

会议类型: 国际会议

会议名称: 2011 3rd IEEE International Conference on Computer Research and Development(ICCRD 2011)(2011第三届计算机研究与发展国际会议)

会议地点: 上海

会议语种:英文

页码: 297-301

在线出版日期: 2011-03-11（万方平台首次上网日期，不代表论文的发表时间）