An Enhanced TLP System for ESD Characterization in Semiconductor Technologies
Standard transmission line pulse (TLP) test system has been studied for evaluating ESD performance of semiconductor devices accurately. The impedance matching techniques in the standard transmission line pulse (TLP) test system can effectively eliminate the pulse waveform distortion, but increases the power attenuation. Thus the force imposed to the device under test is far less than the energy TLP delivered. Most of the researchers tried to solve the problem by promoting the charging voltage to obtain high-current discharge source. In this paper, parallel transmission line (PTL) technique is presented, which discharges the high transient current pulse with nearly doubled energies to enhance the costeffectiveness of the system. In addition, improved attenuator and filter with perfect matching characteristic are designed in order to adapt to the new system.
ESD TEST TLP
Guang Chen Le Gao Ning Zhang ShaolongLiu Yuhua Cheng
Shanghai Research Institute of Microelectronics (SHRIME) Peking University Shanghai,China Microelect Shanghai Research Institute of Microelectronics (SHRIME) Peking University Shanghai,China
国际会议
上海
英文
402-406
2011-03-11（万方平台首次上网日期，不代表论文的发表时间）