A New Thin-film Piezoelectric Sensor for Measuring Methane Gas

摘要：

To measure the concentration of CH4, we developed a thin film piezoelectric acoustic sensor (TFPAS),it accomplishes the detection of CH4 by the absorption of CH4 which can change the oscillation frequency of the piezoelectric crystal. The sensor is mainly composed by the piezoelectric film, sensitive film, silicon substrate and electrodes. The sensitive film is made up of nanometer-sized MgO scattered on pitchbased activated carbon fibers which has a strong adsorption of CH4. The piezoelectric film is a ZnO film which has very high piezoelectric characteristic parameters. The experimental results show that the sensitivity of the sensor to CH4 is very high. The response of the sensor to the presence of CH4 tested was found to be linear within a certain detection range and the detection error is less than 5％.

关键词： Thin-film Piezoelectric sensor Methane gas

作者: Minming Tong Ying Li Shoufeng Tang Fei Han

作者单位: School of Information and Electrical Engineering,China University of Mining & Technology,Xuzhou,Jiangsu Province,China

会议类型: 国际会议

会议名称: 2011 3rd International Conference on Computer and Network Technology(ICCNT 2011)(2011第三届IEEE计算机与网络技术国际会议)

会议地点: 太原

会议语种:英文

页码: 94-96

在线出版日期: 2011-02-26（万方平台首次上网日期，不代表论文的发表时间）