New Ways of Improving the Property of the Piezoelectric Fluidic Angular Rate Sensor

摘要：

New ways of improving the property of the piezoelectric fluidic angular rate sensor are described in the paper. According to the improved schemes of the structure and the process, the repeatability of null voltage, the cross-coupling and stability of the sensor are improved. The numerical results have shown that the repeatability of null voltage increases from 0.2°/S to 0.1 °/S and the crosscoupling decreases from 2％ to 1％.

关键词： Angular rate Piezoelectric fluidic hotwire

作者: Quangang Yu Linhua Piao Xing Wang

作者单位: Sensors Technology Research Centre Beijing Information Technology Beijing,100085,China

会议类型: 国际会议

会议名称: 2011 3rd International Conference on Computer and Network Technology(ICCNT 2011)(2011第三届IEEE计算机与网络技术国际会议)

会议地点: 太原

会议语种:英文

页码: 310-313

在线出版日期: 2011-02-26（万方平台首次上网日期，不代表论文的发表时间）