MEMS-based micro-Pspice parameter acceleration sensor circuit design

摘要：

This paper describes the use of HuaJing Company Pspice Transistor Division developed a miniature accelerometer parameters and signal processing integrated circuits. This system can be on the surface micromachining process for the production of the sensor signal processing, to achieve monolithic integration, but also the fabrication of bulk silicon sensors for signal processing, and hybrid integration.

关键词： MEMS(icro-Electro-Mechanical-System) micro-accelerometer bulk silicon micromachining surface micromachining

作者: Hongli Li Huiqin Sun

作者单位: Information Engineering College,Hebei University of Technology,Tianjin,China Electronic Information Electronic Information Engineering College,Tianjin Vocational College,Tianjin,China

会议类型: 国际会议

会议名称: 2011 3rd International Conference on Computer and Network Technology(ICCNT 2011)(2011第三届IEEE计算机与网络技术国际会议)

会议地点: 太原

会议语种:英文

页码: 268-272

在线出版日期: 2011-02-26（万方平台首次上网日期，不代表论文的发表时间）