The Reactive Gas Fuzzy Controller Based on ARM

摘要：

The reactive gas fuzzy controller adopts ARM micro controller LPC2210 of PHILIPS Co.as the core of the control system.Many kinds of anti-interference method and a very reliable data storage technology are adopted in the design of the software and the hardware system,to ensure that the controller owns the fast-speed voltage auto holding ability,and the key constant-voltage process of the technique requirement can be realized.The experiment results of the controller are presented and analyzed,proving out that the controller can be used in different sputtering technique requirement with very high reliability and good application value.

关键词： magnetic sputtering ARM constant pressure control fuzzy control

作者: Zuhua Xu Zeguang Su Lan Liu Yuncheng Li

作者单位: College of Electrical Engineering University of South China Hengyang,China Hengyang Vacuum Electro-mechanical Equipment Co.Ltd.Hengyang,China

会议类型: 国际会议

会议名称: 2011 3rd International Conference on Computer and Network Technology(ICCNT 2011)(2011第三届IEEE计算机与网络技术国际会议)

会议地点: 太原

会议语种:英文

页码: 359-361

在线出版日期: 2011-02-26（万方平台首次上网日期，不代表论文的发表时间）