Design and analysis of micromechanical resonant accelerometer
A novel micro resonant accelerometer was designed for increasing the sensitivity of resonant accelerometer, which includes two double-ended tuning forks, a proof mass, two-leverage system amplifying inertial force, and drive/sense combs. Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes. The device is fabricated using MEMS bulk-silicon technology-. We analyze the single-stage micro-lever, and give out the key points of designing the micro-leverage mechanisms. The relationship between the sensitivity of accelerometer and each structure parameter were analyzed by the theory method. The result shows that the sensitivity of the accelerometer is about 33Hz/g.
MEMS resonant accelerometer sensitivity styling insert
Li Jing Fan Shang chun Guo Zhan she Li cheng
School of Instrumentation Science & Optoelectronics Engineering Beijing University of Aeronautics & School of Instrumentation Science & Optoelectronics Engineering Beijing University of Aeronautics &
国际会议
太原
英文
645-648
2011-02-26（万方平台首次上网日期，不代表论文的发表时间）