Analysis of Periodical Microstructures Using Optical Methods

摘要：

In this work we present an optical laser based method for characterization of periodical microstructure．It allows indirect evaluation of geometrical and optical parameters of periodical microstroctures．Proposed method is applicable for optimization and control of technological Processes in the cases when traditional measurement techniques are not suitable．The main experimental results are compared with the computer simulations where the standard programs PCGrate-SX6.0 and and GSolver V4.20b were employed．Error of estimation of geometrical parameters of periodical microstructures by comparing theoretical and experimental values of djfrraction efficiencies of periodical microstructures is less than 5％．

关键词： microstructure diffraction measurements laser

作者: Arvydas Palevicius Giedrius Janusas

作者单位: Intemational Studies Centre Kaunas University of Technology Kaunas,Lithuania

会议类型: 国际会议

会议名称: 2011 International Conference on Manufacturing and Industrial Engineering(ICMIE 2011)(2011年制造及工业工程国际会议)

会议地点: 海口

会议语种:英文

页码: 40-44

在线出版日期: 2011-02-22（万方平台首次上网日期，不代表论文的发表时间）