Axial Resolution of the Laser Affected Voxel of the Ultra．short Pulse Laser Modification inside of the Transparent Media

摘要：

The ultra-short pulse laser direct 3D writing inside of the transparent material becomes a commonly accepted tool to achieve the micrometer scale optical devices and Iab-onchips．The disproportionate scale of the laser affected volume (Affected voxel)along the axial direction degrades the precision of the processing．The refraction will not only change the focusing position and elongate the axial scale of the affected voxel．but also cause harmful astigmatism．The shape of the afiected voxel is discussed and experimentally detected to provide the information to establish a practical processing plan．

关键词： Ultra-short pulse laser micro-machining Laser 3D direct writing Transparent material Lab-on-chips

作者: Gang Chang Yiliu Tu

作者单位: Department of Mechanical and Manufacturing Engineering University of Calgary,CanadaT2N2N5 Department of Mechanical and Manufacturing Engineering University of Calgary,Canada,T2N2N5

会议类型: 国际会议

会议名称: 2011 International Conference on Manufacturing and Industrial Engineering(ICMIE 2011)(2011年制造及工业工程国际会议)

会议地点: 海口

会议语种:英文

页码: 68-71

在线出版日期: 2011-02-22（万方平台首次上网日期，不代表论文的发表时间）