Fabrication and Characterization of Nanoscale Porous Copper Film

摘要：

Cu-38Zn thin film(wt％) was deposited on the unheated microscope glass at the nanometer scale by DC magnetron sputtering．Subsequently。the nanocrystalline films were dealloved iu H2SO4 aqueous solution etching of zinc component,resulting iu the formation of nanoscale porous copper film with average porous diameter of approximately 94 nm．The films microstructure and element composition were characterized by X-ray diffraction and scanning electron microscopy．The experimental results show that Cu38Zn films are quasi-amorphous structure，porous copper film with different porous sizes is prepared by selective dissolution of zinc atoms from a nanocry stalline dual-phase film under free corrosion conditions．the grain size of the Cu-Zn films has an important efrect on the dealloying process and the microstructnres of the nanoscale copper films．

关键词： nano-porous copper films dealloying magnetron sputtering Cu-Zn alloy

作者: Ding Liuwei Geng Haoran Xu Jinghua

作者单位: School of Materials Science and Engineering University of Jinan,Jinan,China

会议类型: 国际会议

会议名称: 2011 International Conference on Manufacturing and Industrial Engineering(ICMIE 2011)(2011年制造及工业工程国际会议)

会议地点: 海口

会议语种:英文

页码: 95-98

在线出版日期: 2011-02-22（万方平台首次上网日期，不代表论文的发表时间）