Design of a SEM Compatible Slip-Stick Nano-Positioner with High Bearing Capacity

摘要：

This paper presents a new structure of slip-stick positioner with a high bearing capacity，which is designed according to the requirement of nano-manipulation in the Scanning Electron Microscope(SEM)．In addition to analyze the performance of the slip-stick positioner,a dynamic model is developed in MATLAB/Simulink．The experimental results demonstrate the excellent performance of this positioner and especially its bearing capacity．can be up to 400g．

关键词： slip-sfick dynamic model nano-manipulation SEM

作者: Weibin Rong Miao Yu Shizhong Zhang Lefeng Wang Lining Sun

作者单位: State Key Laboratory of Robotics and System Harbin Insitute of Technology Harbin,China State Key Laboratory of Robotics and System Harbin Insitute of zechnology Harbin,China

会议类型: 国际会议

会议名称: 2011 International Conference on Manufacturing and Industrial Engineering(ICMIE 2011)(2011年制造及工业工程国际会议)

会议地点: 海口

会议语种:英文

页码: 99-104

在线出版日期: 2011-02-22（万方平台首次上网日期，不代表论文的发表时间）