Thermo-structural Coupled Topology Optimization of Micro-capacitive Accelerometer
In order to enhance the working performance of micro-capacitive accelerometer in high temperature environment,the structure topololgy optimization of a microcapacitive accelerometer is proposed．After the study of thermo-structuraI coupled governing equations and sensitivity analysis，the mass—block and elastic-beam structure of comb micro-capacitive accelerometer topology optimization model is established．Then the optimal topology forms of mass—block and elastic-beam structure are obtained with the MMA (method of moving asymptotes)method．At last，the calculating results indicate that the maximum deformation at acceleration detection direction is only 22nm at the operating temperature range of 0～300℃，which less than the maximum deformation of the limit value(25nm)．and provides a reliable way for innovative design of micro-capacitive accelerometer．
topology optimization micro-capacitive accelerometer thermo-structural coupling Field sensitivity analysis MMA method
Huanyuan Chen Yongjun Xie Dongsong Yan Hao Liu Jingming Li
College of Electrical ＆Information Engineering Jinan University Zhuhai,China
国际会议
海口
英文
233-236
2011-02-22（万方平台首次上网日期，不代表论文的发表时间）