Systematic Direct Solid Modeling Approach for Surface Micromachined MEMS

摘要：

Current MEMS design methods do not fulfill the needs of emerging complex MEMS devices．In this paper,a systematic direct solid modeling approach for surface micromachined MEMS design is proposed．In this approach． practical model of a surface micromachined MEMS device, designed in a traditional CAD environment,is simplified firstly； after simplification，masks and process sequences are generated through solid-based mask synthesis；then local variation is used to refining the 3D layer model； finally masks and process sequences are verified in rough simulation and accurate simulation．The approach aims at enabling designers to focus on creative design activity in an intuitive mode．

关键词： MEMS CAD Direct solid modeling Surface micromachining

作者: Jianhua LI Yusheng LIU Hao LING Weibin GUO Gaoqi HE

作者单位: Dept of　Computer Sci．And Eng．,East China University of Science and Technology,Shanghai,200237,China State Key Lab of CAD ＆CG,Zheiiang University,Hangzhou Zheiiamz,China

会议类型: 国际会议

会议名称: 2011 International Conference on Manufacturing and Industrial Engineering(ICMIE 2011)(2011年制造及工业工程国际会议)

会议地点: 海口

会议语种:英文

页码: 294-298

在线出版日期: 2011-02-22（万方平台首次上网日期，不代表论文的发表时间）