Analysis and Simulation of Shunt Capacitive RF MEMS Switch

摘要：

Radio frequency micro-electromechanical system (RF MEMS) switch has attracted more and more attention for its excellent performance. On the basis of analyzing the principle of Shunt Capacitive RF MEMS Switch, this paper studies the effect of equivalent circuit parameters and structure parameters on the microwave characteristics of the MEMS switch respectively. The study will be useful for RF MEMS Switch design and fabrication.

关键词： RF MEMS MMIC SW1TCHJNSERTJ0N LOSS ISOLA TION S1MULA TI0N CPW

作者: ZhenKelong LvShanwei Zhang Yan

作者单位: School of Electronic and Information Engineering Beihang University Beijing, China

会议类型: 国际会议

会议名称: 2011 International Conference on Communication and Electronics Information(ICCEI 2011)(2011年通信和电子信息国际会议)

会议地点: 海口

会议语种:英文

页码: 176-180

在线出版日期: 2011-02-22（万方平台首次上网日期，不代表论文的发表时间）