Temperature Fields in the Silica Substrate Induced by the Scattering of LaserInteraction with a Spherical Microparticle

摘要：

Laser interaction with a microparticle induces a strong near-field enhancement confined to a very small area, so this enhanced field can be applied to create nanoscale structures on the silicon substrate. In the process of the formation for the nanostructures, initially the silicon substrate is locally melted due to optical field enhancement between the spherical microparticle and the substrate. Then the melt and mushy zones occurs and nanostructures form after solidification. In order to obtain a further understanding for the formation of the nanostructures on the silicon substrate, a heat transfer model is employed to predict the shape and size of the nanoscale fusion zone on the silicon substrate in this proposal. This study calculated the fusion zone induced by the scattering field of laser incident on a microparticle.

关键词： scattering laser microparticte melting zone

作者: C.Y. Ho M.Y. Wen

作者单位: Hwa Hsia Institute of Technology Department of Mechanical Engineering Hwa Hsia In stitute of Technol Cheng Shiu University Department of Mechanical Engineering Hwa Hsia In stitute of Technology Taipei

会议类型: 国际会议

会议名称: 2011 International Conference on System Modeling and Optimization(ICSMO 2011)(2011年系统建模与优化国际会议)

会议地点: 贵阳

会议语种:英文

页码: 98-101

在线出版日期: 2011-01-26（万方平台首次上网日期，不代表论文的发表时间）