Capacitive micro-accelerometer PSPICE Simulation Model research

摘要：

During the process of establishing the capacitive micro-accelerometer PSPICE Simulation Model, considering the precise electrical model of the capacitance, According to the characteristics of MEMS capacitance, established micro accelerometer PSPICE simulation model. In the model, the electrical and mechanical coupling process of Capacitive MEMS sensor was analyzed. By using this simulation model, the closed-loop detection circuit was simulated by PSPICE. The simulation results show that the closedloop capacitance detection circuit can effectively improve the linearity and the measure range of the capacitive micro-accelerometer, it can eliminate mechanical resonance. But the closed-loop systems stability and response speed must be ensured. Therefore, the establishment of capacitive microaccelerometer PSPICE simulation model is very valuable to the design and simulation of the closedloop capacitive detection circuit

关键词： Micro Accelerometer apacitance PSPICE Simulation Model

作者: Long kan Luo Chao

作者单位: Modern Education Technology Center Jinggangshan University Jian, Jiangxi,China 343009

会议类型: 国际会议

会议名称: Third International Symposium on Information Science and Engineering(第三届信息科学与工程国际会议 ISISE 2010)

会议地点: 上海

会议语种:英文

页码: 599-602

在线出版日期: 2010-12-24（万方平台首次上网日期，不代表论文的发表时间）