Vibration Control on Single Axis Flexible Piezoelectric Positioning Stage by PID Controller
The objective of this study is to suppress the relative displacement between lens set and granite platform using a micro flexible positioning mechanism , installed between lens set and gantry , with active vibration control. The relative displacement between lens set and granite platform was measured by a sensor and was then sent to a controller as input. If there is any horizontally relative displacement,the controller will send an output signal to a piezoelectric actuator in the positioning mechanism to cancel out the relative displacement. In the current study, a PID controller was applied to control the single axis mechanism. The displacement signal was detected by a laser displacement transducer for the feedback control. In addition, a mathematical model is set up for the piezoelectric micro positioning stage to sim -ulate the performance of the PID controller under step inputs. Output displacement responses of the flexible positioning stage are observed by varying the proportional , integral, derivative parameters of the controller. The goal of this study is to suppress the horizontally relative displacement of 15～20 μm(peak value) between the lens set and granite platform under a frequency range of 0～10 Hz. Through simulations and experiments of dynamic tracking , it was verified that the vibration of stage is effectively decreased to 2～3 μm after control under the proposed frequency range.
Yun-Hui LIU Ching-Ming CHAO Chin-Tu LU Kuo-Shen CHEN
Dept.of Mechanical Engineering , Southern Taiwan University , Tainan, Taiwan Dept.of Mechanical Engineering , National Cheng Kung University , Tainan, Taiwan
国际会议
5th International Symposium on Environmental Vibration(第五届环境振动国际研讨会)
成都
英文
883-889
2011-10-20（万方平台首次上网日期，不代表论文的发表时间）