Fabrication of periodic microstructures in microchannels by water-assisted femtosecond laser ablation
We have fabricated microchannels with periodic protrusions in silica glass by using water-assisted femtosecond laser ablation. The size and distribution of the protrusions in the fabricated microchannels can be controlled by changing the size of the ablated area. After heat treatment, the shape of the protrusions can be changed into oval. The roughness of the internal surface and the light transmittance of the microchannel can be improved by heating treatment. The experimental results show that it is possible to fabricate high quality complex microchannels.
Yan Li Shiliang Qu
Department of Optoelectronics Science, Harbin Institute of Technology at Weihai, Weihai, China
国际会议
长春
英文
1-3
2011-08-29（万方平台首次上网日期，不代表论文的发表时间）