Sensitivity and Noise Characteristics of Si-Nanowire BioFETs
pH sensing response and low-frequency noise characteristics and biosensing potential of Si-nanowire (Si-NW) BioFETs are reported. Using a top-down approach, two types of Si-NW BioFETs with conventional straight-line nanowires or honeycomb structure nanowires have been successfully fabricated on Si-on-insulator substrate. The pH sensitivity of 40 mV/pH from the devices has been attained. From the low-frequency noise characteristics, the volume trap density has been calculated as low as 5×1013 eV-1cm-3, comparable to the conventional MOSFETs. In addition, detection of carcinoembryonic antigen (CEA) has been conducted in order to compare the biosensing capability of both devices. As a result, the Si-NW BioFETs with honeycomb nanostructure show better performances in terms of sensitivity and detection limit.
Jeong-Soo Lee Taiuk Rim Sungho Kim Kihyun Kim Chang-Ki Baek M.Meyyappan
Division of IT Convergence Engineering, Pohang University of Science and Technology, Pohang, Korea D Department of Electrical Engineering, Pohang University of Science and Technology, Pohang, Korea Division of IT Convergence Engineering, Pohang University of Science and Technology, Pohang, Korea N
国际会议
长春
英文
1-4
2011-08-29（万方平台首次上网日期，不代表论文的发表时间）