Influence of Processing Parameter on Nanoscale Anodic Oxidation by AFM

摘要：

Combining the pressure sensors oxidation insulating nanostructure fabrication this paper studied the impact of bias voltage, ambient temperature and humidity on the size of oxide dots during the AFM-based anodic oxidation nano-fabrication. Experimental results show that the size of oxide dots increases with the increasing bias voltage and ambient humidity, but too high bias voltage and ambient temperature will cause staircase phenomena on the surface of oxide dot; ambient temperature 22 ℃, bias voltage 8V, humidity 50% and oxidation time 8s are relatively suitable processing parameters for the oxidation fabrication of n-type Si (100).

作者: Yanbing Leng Lianhe Dong Yanjun Sun Zhe Chen Zhenfang Ma

作者单位: Changchun University of Science and Technology, Changchun, China CNGC Jilin DongGuang Group Corporation, Changchun, China

会议类型: 国际会议

会议名称: The First International Conference on Manipulation,Manufacturing and Measurement on the Nanoscale(第一届3M-NANO国际会议)

会议地点: 长春

会议语种:英文

页码: 1-4

在线出版日期: 2011-08-29（万方平台首次上网日期，不代表论文的发表时间）